The ZYGO ZMI-4004, identified by the part number 8020-0500-01, is a 4-axis, VME64x measurement board designed for high-precision displacement and distance measurements. This board is part of Zygo Corporation's ZMI series, which specializes in nano-position sensors and displacement measuring interferometers. The ZMI-4004 is specifically designed for applications requiring high accuracy and stability in positioning and displacement measurements across four axes.

Key features of the ZYGO ZMI-4004 include:

• 4-Axis Measurement: It provides high-precision displacement and distance measurements across four axes, making it suitable for applications where precise positioning and alignment are critical.
• VME64x Form Factor: The board is designed to fit into a VME64x slot, allowing for easy integration into existing VME-based systems. This form factor is particularly useful in applications where space is limited, and the board needs to be compact and easily integrated into existing systems.

• High Precision and Stability: The ZMI-4004 is designed for applications requiring extreme accuracy in positioning and displacement measurements. It is suitable for a wide range of precision metrology applications, including wafer stages, stacked stage systems, reticle stages, gantry systems, and steering mirrors.